LITHOGRAPHY

NXQ4000 Series – R&D & pilot line production

NXQ4000 Series – R&D & pilot line production

The NXQ4000 Series Mask Aligner is ideal for universities and pilot line production, supporting substrate sizes from pieces up to 200 mm and an easy to use interface with simple, topside mask loading. The NXQ4000 Series Semi-Automatic Mask Aligner combines innovative design with precision alignment and exposure features. The automatic sequencing makes the system very easy to learn and use and is well suited for multi-user labs. The extreme reliablity, low cost of ownership and versatility of the NXQ4000 has made it the choice of manufacturing facilities, R&D Centers and university programs around the world, for a wide range of technologies.

The NXQ4000 Series Mask Aligner is ideal for Microelectronics, LED / HB LED, 3D IC, SIOP, WLP, 2.5D Interposer, MEMS, BioMEMS, MicroFluidics, Compound Semi, Solar (HCPV), and Optoelectronics applications.

NXQ4000 Features and Specifications

Product Literature

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