NXQ, a leading provider of production photolithography equipment, today announced a multisystem, multisite purchase of the NXQ8000 Series production Mask Aligner Platform by Elmos Semiconductor AG and its subsidiary, SMI.
Elmos, a leading semiconductor manufacturer based in Germany, and SMI, a manufacturer of MEMS pressure sensors based in Milpitas, California, completed extensive demo testing on three major mask aligner manufacturers and concluded that the NXQ8000 was best suited for their needs. The NXQ8000 is the industry’s first dual-use platform, integrating both optical Backside Alignment and front to back IR inspection without any hardware conversion.
According to Mr. Holger Doering, Chief Operating Officer at SMI, “During our evaluation of competitive mask aligner systems, we found that the Neutronix Quintel NXQ8000 was the only system that enabled us to buy just one piece of equipment to serve multiple uses. All in all, the NXQ8000 is the perfect solution to fit our needs.”
The NXQ8000 Series Mask Aligner combines an ‘open architecture’ modular design with precision alignment and exposure features. The platform is scalable from R&D to HVM using the same process recipes by adding Robot Upgrade and handles partial and whole substrates up to 200 mm (8-inch) in diameter. The versatility of the NXQ8000 has made it the choice of manufacturing facilities, R&D Centers, and University programs around the world, for a wide range of technologies. The Neutronix Quintel NXQ8000 Platform is available today in production quantities. Please visit www.neutronixinc.com for more information.
SMI is a premier developer and manufacturer of MEMS-based pressure sensors for a broad range of markets, with years of experience and expertise in low pressure and harsh environment pressure sensors that meet today’s stringent requirements for medical, automotive and industrial applications. SMI’s design, production and quality control processes have enabled it to develop both the most sensitive and smallest MEMS pressure sensors available on the market today. For more information, visit www.si-micro.com.
SMI is a member of the worldwide Elmos Group, offering proven solutions to a range of industries, based on application-specific ICs, sensors and complete microsystems.
Elmos Semiconductor AG engages in the development, manufacture, and distribution of microelectronic components and system parts in Germany and internationally. Its products include interface components, DC/DC converters, motor drivers, sensors, low side and IGBT drivers, optical sensors, as well as gestic and motion detection products. The company offers semiconductors for various applications in automotive, industrial and consumer applications. The company was founded in 1984 and is headquartered in Dortmund, Germany.
NXQ manufactures photolithography and metrology equipment to customers who develop and manufacture a wide range of semiconductor products including MEMS, Wafer Level Packaging (WLP), 3DIC, System in Package (SIP), Compound Semiconductor (CS), Microfluidics, Optoelectronics and many other technologies. Founded by industry veterans, NXQ has been manufacturing mask aligners for over 35 years.
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