NXQ200 UV-LED Flood Exposure System

  • The NXQ200 UV-LED Flood Exposure System is designed to replace conventional Hg (Mercury) light sources operating either in broadband or at i-line (365nm).
  • The UV intensity is fully adjustable through software control.  UV intensities, as measured on the exposure plane are:
    • Up to 31mW/cm2 @ 365nm
    • Up to 75mW/cm2 @ 405nm
  • The NXQ200 intensities equate to Hg light sources operating at 1,000W
  • Accommodates up to 200mm wafer size
  • Software control of exposure wavelength(s) and intensity
  • Long-lasting with no routine maintenance requirement due to UV-LED light source
  • Constant intensity, monitored and controlled by on-board metrology
  • Instant ON, with no light source warm-up
  • Low power consumption
  • Closed-loop, liquid-cooled system
  • USB remote interface
  • Non-uniformity <3%
  • 19” 4U rack-mounted controller
  • Standard light source size is 10”x10”x36”, with custom designs available
  • Configurations available for:
    • UV Curing 
    • Shadow Mask/Edge Bead 
    • 1st Mask 
    • Replacement for track-based Hg Flood Expose units
Applications
  • Biotechnology, Microfluidics, Microelectronics, LED, MEMS, Compound Semiconductor, Solar, Optoelectronics
  • Advanced Packaging:
    • 3DIC
    • SIP
    • WLP
    • 2.5D Interposer