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Neutronix Quintel (NXQ) Announces Sale of Cluster Tool to Major Defense Contractor

Announcement highlights the sale of the NXQ8000CT Cluster Tool to a major defense contractor for complete substrate processing

Morgan Hill, Calif. (October 23, 2020) — Neutronix-Quintel, Inc. (NXQ), a leading provider of production photolithography equipment, today announced the sale of the NXQ8000CT Cluster Tool to a major domestic defense contractor.  The tool was installed at the customer site 6 months ago and was signed off for high-volume manufacturing (HVM) within 2 weeks of install.

According to Brett Arnold, President of NXQ, “NXQ has continued to push-the-envelope in terms of designing and manufacturing state-of-the-art mask aligners, and has taken a large step forward in combining this product with other critical modules into the NXQ8000CT Cluster Tool, suitable for HVM of advanced defense components.  The NXQ8000CT combines the workhorse NXQ8008 Mask Aligner with our new NXQ200 Flood Exposure System, and purpose-built coating and developing modules.  Both the NXQ8008 and the NXQ200 are configured with NXQ’s proprietary UV-LED light source for maximum lithographic performance and exceptionally long lifetime.  The NXQ8000CT is commercially-available to all customers seeking end-to-end lithographic processing.”

At the core of the NXQ8000CT Cluster Tool is NXQ’s world-renown NXQ8008 Mask Aligner with Front-to-Back Overlay Inspection System integrated with state-of-the-art Robotic Automation and alignment stage design.  Both the NXQ8008 and NXQ200 are equipped with revolutionary UV-LED exposure sources, with printing and exposure performance far superior to that of mercury lamp sources, and ones that last 7-10 years in an HVM environment.  The NXQ8008 alignment stage utilizes the latest in linear motion technology.  With encoder feedback loops measuring actual stage position (not motor position), the vision system is not limited by the hardware, allowing for alignment accuracies of less than 0.5um 3 sigma. This accuracy is achieved using our Quadcam Microscope with 5x objectives, delivering an ideal combination of magnification, field-of-view, and depth-of-focus.

About NXQ

NXQ manufactures photolithography and metrology equipment for customers who develop and manufacture a wide range of semiconductor products including MEMS, Wafer Level Packaging (WLP), 3DIC, System in Package (SIP), Compound Semiconductor (CS), Microfluidics, Optoelectronics and Bio Science technologies. NXQ was founded by industry veterans and has been designing and manufacturing mask aligners for over 35 years.

More Information:

For more information on NXQ and their full line of products, please visit www.neutronixinc.com or contact Neutronix Quintel directly at sales@neutronixinc.com.

For more information please contact:

Lenore Arnold

Neutronix Quintel

(408) 776-5190

sales@neutronixinc.com

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Neutronix Quintel (NXQ) Announces Sale of NXQ8012 300MM, Large Substrate Lithography System to World-Renowned Optical Tool Company

Announcement highlights the sale and installation of the NXQ8012 for large-area substrate handling and lithographic processing

Morgan Hill, Calif. — Neutronix-Quintel, Inc. (NXQ), a leading provider of production photolithography equipment, today announced the sale and installation of our ultra-compact 300mm mask aligner, the NXQ8012, configured for handling large-area substrates up to 320mmx320mm.  The tool was purchased by a world-renowned optical tool company after viewing and comparing all available mask aligners.  The tool was installed and accepted into production in less than three (3) days.

According to Brett Arnold, President of NXQ, “NXQ continues to push-the-envelope in terms of designing and manufacturing state-of-the-art mask aligners capable of handling extremely large substrates, that push imaging capability down to 1.0 micron.  The NXQ8012 offers the smallest available footprint combined with a UV-LED exposure source producing polychromatic or monochromatic outputs, and best-in-class overlay performance.  When asked the direct question, “How was your experience and how did NXQ perform?”, the client replied that “NXQ gets a score of 9 out of 10 for machine quality, machine performance, and onsite support, and no one will ever receive a score of 10 out of 10 from us”.  The NXQ8012 is commercially available and offers unprecedented performance for many applications.”

The NXQ8012 Production Mask Aligner integrates state of the art Robotic Automation and alignment stage design. Equipped with the revolutionary UV-LED exposure source, the printing performance is superior to that of mercury lamp sources and will last 7-10 years in an HVM environment before any major service is required.  The NXQ8012 alignment stage utilizes the latest in linear motion technology so  the vision system is not limited by the hardware, allowing for alignment accuracies of less than 0.5um 3 sigma. This accuracy is achieved using our Quadcam Microscope with 5x objectives, delivering an ideal combination of magnification, field-of-view, and depth-of-focus.

About NXQ

NXQ manufactures photolithography and metrology equipment for customers who develop and manufacture a wide range of semiconductor products including MEMS, Wafer Level Packaging (WLP), 3DIC, System in Package (SIP), Compound Semiconductor (CS), Microfluidics, Optoelectronics and Bio Science technologies. NXQ was founded by industry veterans and has been designing and manufacturing mask aligners for over 35 years.

For More Information:

For more information on NXQ and their full line of products, please visit www.neutronixinc.com or contact Neutronix Quintel directly at sales@neutronixinc.com.

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Neutronix Quintel (NXQ) Announces New Agreement with leading UV-LED Light Source Manufacturer

Announcement highlights exclusive agreement for NXQ’s manufacture of world-class mask aligner and flood exposure products utilizing advanced UV-LED light sources

Morgan Hill, Calif. (September 25, 2020) — Neutronix-Quintel, Inc. (NXQ), a leading provider of production photolithography equipment, today announced an exclusive agreement to integrate advanced UV-LED light sources in NXQ mask aligners and flood exposure tools produced by NXQ for worldwide customers.

The advanced UV-LED light sources are best-in-class solutions that are ideally suited for semiconductor manufacturing (photolithography), as well as challenging UV-curing applications.  Features of their high-power LED light sources are beneficial when there is a need to establish robust processes.  These UV-LED light sources are polychromatic, offering unparalleled ability to optimized speed and resolution of the overall photolithography process.

According to Brett Arnold, President of NXQ, “NXQ has been looking for an outstanding partner to supply and support UV-LED light sources, and we are delighted to announce that we have entered into an exclusive agreement.   Their design and manufacturing capabilities are second-to-none and working with them on an ongoing basis has been an extremely positive experience.  We have successfully integrated their UV-LED lights sources into our existing portfolio of state-of-the-art mask aligners, as well as our recently introduced flood exposure tool product line.”

These UV-LED light sources are available as an option on all our Mask Aligner products, and a standard feature of our new NXQ200 Flood Exposure System.  NXQ has already begun delivering NXQ8012 Mask Aligners, NXQ8000C Cluster Tools, and NXQ200 Food Exposure Systems with these UV-LED light sources.  The ease of integration of these UV-LED light sources into NXQ products also allows NXQ the unique ability to offer our customers the ability to upgrade their existing NXQ tools.  NXQ has worked diligently with our UV-LED light source partner to enhance the capability of our state-of-the-art mask aligners in terms of resolution and throughput.

More Information:
For more information on NXQ and their full line of products, please visit www.neutronixinc.com or contact Neutronix Quintel directly at sales@neutronixinc.com.

About NXQ

NXQ manufactures photolithography and metrology equipment for customers who develop and manufacture a wide range of semiconductor products including MEMS, Wafer Level Packaging (WLP), 3DIC, System in Package (SIP), Compound Semiconductor (CS), Microfluidics, Optoelectronics and Bio Science technologies. NXQ was founded by industry veterans and has been designing and manufacturing mask aligners for over 35 years.

For more information please contact:
Lenore Arnold
Neutronix Quintel
(408) 776-5190
sales@neutronixinc.com

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Neutronix Quintel (NXQ) Announces New Sales and Support Agreement with leading Taiwanese Company, Scientech Corporation

Announcement highlights expansion for NXQs line of world-class Mask Aligner Products to Important Asian markets

Morgan Hill, Calif. (April 7, 2017) — NXQ, a leading provider of production photolithography equipment, today announced an agreement with Scientech a leading technology representative firm in Taiwan to represent NXQ’s full line of photolithography and mask aligner products in Taiwan and China.

Scientech provides engineering, sales and support for leading high tech products in semiconductor and related industries. The partnership between NXQ and Scientech will help expand market coverage for NXQs full line of photolithography and mask aligner products into critical Asian markets with a rapidly expanding need for semiconductor production equipment.

According to Brett Arnold, President of NXQ, “Asia is a key focus in NXQ’s strategy for growth and we are pleased to work with a leading company such as Scientech. Our customer service sets us apart from competitors and it was extremely important to choose a partner who also values customer relationships. Scientech is an optimal partner for NXQ and we look forward to our joint success.”

“We pride ourselves on representing best-in-class products to our valued customer base and we look forward to helping NXQ expand the market for their impressive photolithography and mask aligner products,” said M.T. Hsu, President of Scientech Corporation.

Scientech Corporation (www.scientech.com) was established in 1979 and has headquarters in Taipei, Taiwan, with five additional offices across Taiwan and Shanghai. Scientech will provide full sales, installation, service, parts, process development assistance and technical support for NXQ’s full line of mask aligner and photolithography equipment, including the NXQ8000 line – a uniquely scalable, high volume production platform.

More Information:
For more information on NXQ and their full line of products, please visit www.neutronixinc.com or contact Neutronix Quintel directly at sales@neutronixinc.com.
For more information on Scientech and their product portfolio, please visit www.scientech.com.

About NXQ
NXQ manufactures photolithography and metrology equipment for customers who develop and manufacture a wide range of semiconductor products including MEMS, Wafer Level Packaging (WLP), 3DIC, System in Package (SIP), Compound Semiconductor (CS), Microfluidics, Optoelectronics and Bio Science technologies. NXQ was founded by industry veterans and has been designing and manufacturing mask aligners for over 35 years.

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For more information please contact:
Lenore Arnold
Neutronix Quintel
(408) 776-5190
sales@neutronixinc.com

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Neutronix Quintel (NXQ) Announces Key Partnership with Biomedical Engineering Company, Aiding Leading Edge Research into Genomic Technologies

Morgan Hill, Calif. — NXQ, a leading provider of production photolithography equipment, today announced that a leading biomedical start-up has chosen the Neutronix Quintel Q8008 AL mask aligner products for their upcoming projects. Typical uses of photolithography in biomedical applications include the creation of custom microfilters and the optimization of specialized Microelectromechanical Systems (MEMS) to study biological interactions including the monitoring of cell activities or biological compatibility tests.

The Palo Alto-based biomedical company is an innovative creator of transformative genomic technologies focused on making a new generation of genomic technologies accessible and affordable for a multitude of previously unapproachable applications. As a result of their collaboration with Neutronix Quintel, multiple systems of the Neutronix Quintel NXQ 8008 AL aligners will be added to a cluster of existing equipment and will be used to assist in their leading-edge genomic applications.

“Our customer is helping to lead the charge on understanding how genomic changes can help solve some of the largest problems of our day including such things as improved cancer treatment and maximizing food production”, said Brett Arnold, CEO of Neutronix Quintel. “The addition of the Neutronix Quintel technology will provide added functionality for bio-medical and micro-fluidic research.”

Product Availability:

The Neutronix Quintel 8008 AL is available today in production quantities. Please visit www.neutronixinc.com for more information.
About NXQ

NXQ manufactures photolithography and metrology equipment for customers who develop and manufacture a wide range of semiconductor products including MEMS, Wafer Level Packaging (WLP), 3DIC, System in Package (SIP), Compound Semiconductor (CS), Microfluidics, Optoelectronics and Bio Science technologies. NXQ was Founded by industry veterans and has been designing and manufacturing mask aligners for over 35 years.

 

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For more information please contact:

Lenore Arnold
Neutronix Quintel
(408) 776-5190
sales@neutronixinc.com

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Neutronix Quintel (NXQ) Announces New Mask Aligner for Substrates of Multiple Sizes up to 12” or 300mm

Morgan Hill, Calif.  — NXQ, a leading provider of production photolithography equipment, today announced the shipment of their new 300mm mask alignment system.

The NXQ8012 is a significant addition to Neutronix Quintel’s industry-leading mask aligner product line and utilizes the latest in linear motion technology combined with an integrated, state-of-the-art Robotic Automation and alignment stage design. The NXQ8012 delivers an impressive array of features including:

  • A comprehensive precision alignment system: With encoder feedback loops measuring actual stage position (not motor position), the vision system is not limited by the hardware, allowing for alignment accuracies of less than 0.5µm 3 sigma.
  • Backside Alignment (BSA) for patterning the backside of wafers: The BSA system has both optical and infrared capabilities integrated into the same unit, allowing the system to be used not only as a photolithography system, but also as an IR microscope for front to back overlay verification.
  • Availability in two configurations for maximum flexibility: The NXQ8012 offers the choice of a small footprint manual load system designed for R&D and pilot line use which is 55 % smaller than its major competitor and is available with an optional add on single FOUP loader system. The NXQ8012 manual load system allows the use of partial and whole substrates of multiple sizes up to 12″ on a single machine, creating unmatched configuration flexibility for multiple projects. For volume production, the NXQ8012 is available as a fully automated version, configured for 200mm/300mm FOUP. The automated version of the NXQ8012 Series Mask Aligner incorporates an EFEM from Milara Corp., delivering lightning fast wafer transfer at twice the positional accuracy of competitors.

Product Availability:

The NXQ8012 is available today in production quantities. Please visit www.neutronixinc.com for more information.

About NXQ

NXQ manufactures photolithography and metrology equipment for customers who develop and manufacture a wide range of semiconductor products including MEMS, Wafer Level Packaging (WLP), 3DIC, System in Package (SIP), Compound Semiconductor (CS), Microfluidics, Optoelectronics and Bio Science technologies. NXQ was founded by industry veterans and has been designing and manufacturing mask aligners for over 35 years.

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For more information please contact:

Lenore Arnold
Neutronix Quintel
(408) 776-5190
sales@neutronixinc.com

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Neutronix Quintel (NXQ) Announces Multi System purchase of their NXQ8000 Mask Aligner Platform by Elmos Semiconductor AG and their subsidiary, SMI (Silicon Microstructures, Inc.).

NXQ, a leading provider of production photolithography equipment, today announced a multisystem, multisite purchase of the NXQ8000 Series production Mask Aligner Platform by Elmos Semiconductor AG and its subsidiary, SMI.

Elmos, a leading semiconductor manufacturer based in Germany, and SMI, a manufacturer of MEMS pressure sensors based in Milpitas, California, completed extensive demo testing on three major mask aligner manufacturers and concluded that the NXQ8000 was best suited for their needs. The NXQ8000 is the industry’s first dual-use platform, integrating both optical Backside Alignment and front to back IR inspection without any hardware conversion.

According to Mr. Holger Doering, Chief Operating Officer at SMI, “During our evaluation of competitive mask aligner systems, we found that the Neutronix Quintel NXQ8000 was the only system that enabled us to buy just one piece of equipment to serve multiple uses. All in all, the NXQ8000 is the perfect solution to fit our needs.”

Product Information:
The NXQ8000 Series Mask Aligner combines an ‘open architecture’ modular design with precision alignment and exposure features. The platform is scalable from R&D to HVM using the same process recipes by adding Robot Upgrade and handles partial and whole substrates up to 200 mm (8-inch) in diameter. The versatility of the NXQ8000 has made it the choice of manufacturing facilities, R&D Centers, and University programs around the world, for a wide range of technologies. The Neutronix Quintel NXQ8000 Platform is available today in production quantities. Please visit www.neutronixinc.com for more information.

About SMI
SMI is a premier developer and manufacturer of MEMS-based pressure sensors for a broad range of markets, with years of experience and expertise in low pressure and harsh environment pressure sensors that meet today’s stringent requirements for medical, automotive and industrial applications. SMI’s design, production and quality control processes have enabled it to develop both the most sensitive and smallest MEMS pressure sensors available on the market today. For more information, visit www.si-micro.com.

SMI is a member of the worldwide Elmos Group, offering proven solutions to a range of industries, based on application-specific ICs, sensors and complete microsystems.

About Elmos
Elmos Semiconductor AG engages in the development, manufacture, and distribution of microelectronic components and system parts in Germany and internationally. Its products include interface components, DC/DC converters, motor drivers, sensors, low side and IGBT drivers, optical sensors, as well as gestic and motion detection products. The company offers semiconductors for various applications in automotive, industrial and consumer applications. The company was founded in 1984 and is headquartered in Dortmund, Germany.

About NXQ
NXQ manufactures photolithography and metrology equipment to customers who develop and manufacture a wide range of semiconductor products including MEMS, Wafer Level Packaging (WLP), 3DIC, System in Package (SIP), Compound Semiconductor (CS), Microfluidics, Optoelectronics and many other technologies. Founded by industry veterans, NXQ has been manufacturing mask aligners for over 35 years.

NXQ
David Geder
Vice President of Sales
dgeder@neutronixinc.com
(781) 264-5591

SMI
Raul Figueroa
Director of Global Marketing
raul.figueroa@si-micro.com
+1 408.473.9797

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X-FAB Recommends the NXQ8008AL

XFAB TEXAS NXQ8008AL – Mask Aligner Qualification and Review. By Dr. Thomas Johnston

The NXQ8008AL is the next generation version of the popular full field proximity Mask Aligner. The NXQ8008AL is designed for the requirements in state of the art cleanroom environments. The system is Windows based with a touchscreen interface and easy for production operations to control. The NXQ8008AL is a fully auto align system that shows operations all puritan information at a glance. The top load mask and non-contact gap allow for high volume production while mask protection is achieved. The NXQ8008AL is capable of multi subtrate types and thickness and require little to no interruption between runs.

The tool combines the field experience of a proven exposure optics and wafer to mask alignment as well as a fully automated cassette to cassette handling system. The full field exposure and wafer handling system the NXQ8008AL offers 100+ wph first prints and 80+ wph with pilot substrates in the proximity and auto alignment mode with a moderate exposure time. The high throughput combined with the relative low investment cost made the NXQ8008AL XFAB’s preferred solution for our needs.

The NXQ first step in the alignment process is obtained with a non-contact prealigner and dual arm robot. The robot and prealigner are able to achieve a highly accurate and precise position of the wafer onto the chuck that allows the alignment targets to be correctly positioned in the NXQ’s field of view at the highest optical magnification. NXQ8008AL views two alignment targets at the same time with the dual video microscopes. This allows dual mask patterns to be viewed at the same time through a digital image recognizer and OCR registration on multi-field monitor. This control format allows for greater accuracy and reduced pattern recognition errors. The standard 5x objectives were used for all alignments and provide an excellent magnification and DOF combination. Higher Magnification objectives can easily be installed as needed depending on PR thickness, target sizes and alignment requirements.

The qualification test was performed in order to determine the NXQ capability under the current XFAB process. The coat and develop operations were performed on standard 8000 SVG systems using DOW SPR220 7.0 resist and MF26a developer. The thickness target was 6.9um on SiO2 and Nitride pilots. Multiple types of etched alignment marks were employed to determine correct pattern recognition. The NXQ8008AL was able to achieve an impressive 0.6um (3sig) on 10 wafer lot setups on 3 different runs. I would expect sub half micron 3 sigma alignment accuracy to be achieved using a 1-2um thick PR.

I want to thank NXQ for the use of their reticle system and technical expertise. I highly recommend the NXQ8000 Series Mask Aligners for the production of MEMS, SAW, Power devices, diodes and other telecom devices.

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Neutronix Introduces the NXQ8006 Sapphire

With the increased demand for LED processing on compound semiconductor substrates up to 6”, Neutronix-Quintel has developed the NXQ8006 Sapphire Mask Alignment System that is dedicated for optimal performance in this sector. With a lower price point than the NXQ8008 as well as an industry leading throughput of over 200 wafers per hour in First Mask Mode and over 140 wafers per hour with autoalignment, the NXQ8006 Sapphire is one of the highest Return on Investment (ROI) mask aligners available in the marketplace.

For more info see the NXQ8000 Series product page

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