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Neutronix Quintel (NXQ) Announces New Sales and Support Agreement with leading Taiwanese Company, Scientech Corporation

Announcement highlights expansion for NXQs line of world-class Mask Aligner Products to Important Asian markets

Morgan Hill, Calif. (April 7, 2017) — NXQ, a leading provider of production photolithography equipment, today announced an agreement with Scientech a leading technology representative firm in Taiwan to represent NXQ’s full line of photolithography and mask aligner products in Taiwan and China.

Scientech provides engineering, sales and support for leading high tech products in semiconductor and related industries. The partnership between NXQ and Scientech will help expand market coverage for NXQs full line of photolithography and mask aligner products into critical Asian markets with a rapidly expanding need for semiconductor production equipment.

According to Brett Arnold, President of NXQ, “Asia is a key focus in NXQ’s strategy for growth and we are pleased to work with a leading company such as Scientech. Our customer service sets us apart from competitors and it was extremely important to choose a partner who also values customer relationships. Scientech is an optimal partner for NXQ and we look forward to our joint success.”

“We pride ourselves on representing best-in-class products to our valued customer base and we look forward to helping NXQ expand the market for their impressive photolithography and mask aligner products,” said M.T. Hsu, President of Scientech Corporation.

Scientech Corporation (www.scientech.com) was established in 1979 and has headquarters in Taipei, Taiwan, with five additional offices across Taiwan and Shanghai. Scientech will provide full sales, installation, service, parts, process development assistance and technical support for NXQ’s full line of mask aligner and photolithography equipment, including the NXQ8000 line – a uniquely scalable, high volume production platform.

More Information:
For more information on NXQ and their full line of products, please visit www.neutronixinc.com or contact Neutronix Quintel directly at sales@neutronixinc.com.
For more information on Scientech and their product portfolio, please visit www.scientech.com.

About NXQ
NXQ manufactures photolithography and metrology equipment for customers who develop and manufacture a wide range of semiconductor products including MEMS, Wafer Level Packaging (WLP), 3DIC, System in Package (SIP), Compound Semiconductor (CS), Microfluidics, Optoelectronics and Bio Science technologies. NXQ was founded by industry veterans and has been designing and manufacturing mask aligners for over 35 years.

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For more information please contact:
Lenore Arnold
Neutronix Quintel
(408) 776-5190
sales@neutronixinc.com

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Neutronix Quintel (NXQ) Announces Key Partnership with Biomedical Engineering Company, Aiding Leading Edge Research into Genomic Technologies

Morgan Hill, Calif. — NXQ, a leading provider of production photolithography equipment, today announced that a leading biomedical start-up has chosen the Neutronix Quintel Q8008 AL mask aligner products for their upcoming projects. Typical uses of photolithography in biomedical applications include the creation of custom microfilters and the optimization of specialized Microelectromechanical Systems (MEMS) to study biological interactions including the monitoring of cell activities or biological compatibility tests.

The Palo Alto-based biomedical company is an innovative creator of transformative genomic technologies focused on making a new generation of genomic technologies accessible and affordable for a multitude of previously unapproachable applications. As a result of their collaboration with Neutronix Quintel, multiple systems of the Neutronix Quintel NXQ 8008 AL aligners will be added to a cluster of existing equipment and will be used to assist in their leading-edge genomic applications.

“Our customer is helping to lead the charge on understanding how genomic changes can help solve some of the largest problems of our day including such things as improved cancer treatment and maximizing food production”, said Brett Arnold, CEO of Neutronix Quintel. “The addition of the Neutronix Quintel technology will provide added functionality for bio-medical and micro-fluidic research.”

Product Availability:

The Neutronix Quintel 8008 AL is available today in production quantities. Please visit www.neutronixinc.com for more information.
About NXQ

NXQ manufactures photolithography and metrology equipment for customers who develop and manufacture a wide range of semiconductor products including MEMS, Wafer Level Packaging (WLP), 3DIC, System in Package (SIP), Compound Semiconductor (CS), Microfluidics, Optoelectronics and Bio Science technologies. NXQ was Founded by industry veterans and has been designing and manufacturing mask aligners for over 35 years.

 

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For more information please contact:

Lenore Arnold
Neutronix Quintel
(408) 776-5190
sales@neutronixinc.com

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Neutronix Quintel (NXQ) Announces New Mask Aligner for Substrates of Multiple Sizes up to 12” or 300mm

Morgan Hill, Calif.  — NXQ, a leading provider of production photolithography equipment, today announced the shipment of their new 300mm mask alignment system.

The NXQ8012 is a significant addition to Neutronix Quintel’s industry-leading mask aligner product line and utilizes the latest in linear motion technology combined with an integrated, state-of-the-art Robotic Automation and alignment stage design. The NXQ8012 delivers an impressive array of features including:

  • A comprehensive precision alignment system: With encoder feedback loops measuring actual stage position (not motor position), the vision system is not limited by the hardware, allowing for alignment accuracies of less than 0.5µm 3 sigma.
  • Backside Alignment (BSA) for patterning the backside of wafers: The BSA system has both optical and infrared capabilities integrated into the same unit, allowing the system to be used not only as a photolithography system, but also as an IR microscope for front to back overlay verification.
  • Availability in two configurations for maximum flexibility: The NXQ8012 offers the choice of a small footprint manual load system designed for R&D and pilot line use which is 55 % smaller than its major competitor and is available with an optional add on single FOUP loader system. The NXQ8012 manual load system allows the use of partial and whole substrates of multiple sizes up to 12″ on a single machine, creating unmatched configuration flexibility for multiple projects. For volume production, the NXQ8012 is available as a fully automated version, configured for 200mm/300mm FOUP. The automated version of the NXQ8012 Series Mask Aligner incorporates an EFEM from Milara Corp., delivering lightning fast wafer transfer at twice the positional accuracy of competitors.

Product Availability:

The NXQ8012 is available today in production quantities. Please visit www.neutronixinc.com for more information.

About NXQ

NXQ manufactures photolithography and metrology equipment for customers who develop and manufacture a wide range of semiconductor products including MEMS, Wafer Level Packaging (WLP), 3DIC, System in Package (SIP), Compound Semiconductor (CS), Microfluidics, Optoelectronics and Bio Science technologies. NXQ was founded by industry veterans and has been designing and manufacturing mask aligners for over 35 years.

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For more information please contact:

Lenore Arnold
Neutronix Quintel
(408) 776-5190
sales@neutronixinc.com

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Neutronix Quintel (NXQ) Announces Multi System purchase of their NXQ8000 Mask Aligner Platform by Elmos Semiconductor AG and their subsidiary, SMI (Silicon Microstructures, Inc.).

NXQ, a leading provider of production photolithography equipment, today announced a multisystem, multisite purchase of the NXQ8000 Series production Mask Aligner Platform by Elmos Semiconductor AG and its subsidiary, SMI.

Elmos, a leading semiconductor manufacturer based in Germany, and SMI, a manufacturer of MEMS pressure sensors based in Milpitas, California, completed extensive demo testing on three major mask aligner manufacturers and concluded that the NXQ8000 was best suited for their needs. The NXQ8000 is the industry’s first dual-use platform, integrating both optical Backside Alignment and front to back IR inspection without any hardware conversion.

According to Mr. Holger Doering, Chief Operating Officer at SMI, “During our evaluation of competitive mask aligner systems, we found that the Neutronix Quintel NXQ8000 was the only system that enabled us to buy just one piece of equipment to serve multiple uses. All in all, the NXQ8000 is the perfect solution to fit our needs.”

Product Information:
The NXQ8000 Series Mask Aligner combines an ‘open architecture’ modular design with precision alignment and exposure features. The platform is scalable from R&D to HVM using the same process recipes by adding Robot Upgrade and handles partial and whole substrates up to 200 mm (8-inch) in diameter. The versatility of the NXQ8000 has made it the choice of manufacturing facilities, R&D Centers, and University programs around the world, for a wide range of technologies. The Neutronix Quintel NXQ8000 Platform is available today in production quantities. Please visit www.neutronixinc.com for more information.

About SMI
SMI is a premier developer and manufacturer of MEMS-based pressure sensors for a broad range of markets, with years of experience and expertise in low pressure and harsh environment pressure sensors that meet today’s stringent requirements for medical, automotive and industrial applications. SMI’s design, production and quality control processes have enabled it to develop both the most sensitive and smallest MEMS pressure sensors available on the market today. For more information, visit www.si-micro.com.

SMI is a member of the worldwide Elmos Group, offering proven solutions to a range of industries, based on application-specific ICs, sensors and complete microsystems.

About Elmos
Elmos Semiconductor AG engages in the development, manufacture, and distribution of microelectronic components and system parts in Germany and internationally. Its products include interface components, DC/DC converters, motor drivers, sensors, low side and IGBT drivers, optical sensors, as well as gestic and motion detection products. The company offers semiconductors for various applications in automotive, industrial and consumer applications. The company was founded in 1984 and is headquartered in Dortmund, Germany.

About NXQ
NXQ manufactures photolithography and metrology equipment to customers who develop and manufacture a wide range of semiconductor products including MEMS, Wafer Level Packaging (WLP), 3DIC, System in Package (SIP), Compound Semiconductor (CS), Microfluidics, Optoelectronics and many other technologies. Founded by industry veterans, NXQ has been manufacturing mask aligners for over 35 years.

NXQ
David Geder
Vice President of Sales
dgeder@neutronixinc.com
(781) 264-5591

SMI
Raul Figueroa
Director of Global Marketing
raul.figueroa@si-micro.com
+1 408.473.9797

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X-FAB Recommends the NXQ8008AL

XFAB TEXAS NXQ8008AL – Mask Aligner Qualification and Review. By Dr. Thomas Johnston

The NXQ8008AL is the next generation version of the popular full field proximity Mask Aligner. The NXQ8008AL is designed for the requirements in state of the art cleanroom environments. The system is Windows based with a touchscreen interface and easy for production operations to control. The NXQ8008AL is a fully auto align system that shows operations all puritan information at a glance. The top load mask and non-contact gap allow for high volume production while mask protection is achieved. The NXQ8008AL is capable of multi subtrate types and thickness and require little to no interruption between runs.

The tool combines the field experience of a proven exposure optics and wafer to mask alignment as well as a fully automated cassette to cassette handling system. The full field exposure and wafer handling system the NXQ8008AL offers 100+ wph first prints and 80+ wph with pilot substrates in the proximity and auto alignment mode with a moderate exposure time. The high throughput combined with the relative low investment cost made the NXQ8008AL XFAB’s preferred solution for our needs.

The NXQ first step in the alignment process is obtained with a non-contact prealigner and dual arm robot. The robot and prealigner are able to achieve a highly accurate and precise position of the wafer onto the chuck that allows the alignment targets to be correctly positioned in the NXQ’s field of view at the highest optical magnification. NXQ8008AL views two alignment targets at the same time with the dual video microscopes. This allows dual mask patterns to be viewed at the same time through a digital image recognizer and OCR registration on multi-field monitor. This control format allows for greater accuracy and reduced pattern recognition errors. The standard 5x objectives were used for all alignments and provide an excellent magnification and DOF combination. Higher Magnification objectives can easily be installed as needed depending on PR thickness, target sizes and alignment requirements.

The qualification test was performed in order to determine the NXQ capability under the current XFAB process. The coat and develop operations were performed on standard 8000 SVG systems using DOW SPR220 7.0 resist and MF26a developer. The thickness target was 6.9um on SiO2 and Nitride pilots. Multiple types of etched alignment marks were employed to determine correct pattern recognition. The NXQ8008AL was able to achieve an impressive 0.6um (3sig) on 10 wafer lot setups on 3 different runs. I would expect sub half micron 3 sigma alignment accuracy to be achieved using a 1-2um thick PR.

I want to thank NXQ for the use of their reticle system and technical expertise. I highly recommend the NXQ8000 Series Mask Aligners for the production of MEMS, SAW, Power devices, diodes and other telecom devices.

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Neutronix Introduces the NXQ8006 Sapphire

With the increased demand for LED processing on compound semiconductor substrates up to 6”, Neutronix-Quintel has developed the NXQ8006 Sapphire Mask Alignment System that is dedicated for optimal performance in this sector. With a lower price point than the NXQ8008 as well as an industry leading throughput of over 200 wafers per hour in First Mask Mode and over 140 wafers per hour with autoalignment, the NXQ8006 Sapphire is one of the highest Return on Investment (ROI) mask aligners available in the marketplace.

For more info see the NXQ8000 Series product page

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Neutronix-Quintel Introduces the NXQ4008 Mask Aligner

With increased demand for lab and manual load production for 8″ wafers, Neutronix-Quintel has developed an 8″ version of the popular NXQ4000 series mask aligners. “This allows our customers to process 8″ wafers at a relatively low cost compared to traditional 8″ equipment” said Brett Arnold, CEO of Neutronix-Quintel. “The NXQ4008, can still be tooled to process small pieces, and wafer sizes up to 8″, making it a very versatile tool for R&D or volume manufacturing.”

For more information, please visit the NXQ4000 series product page.

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NXQ article in Chip Design Magazine – Make the Jump to Next-Generations Contact Aligners

Whoever said, “You can’t get there from here,” was wrong. With the introduction of a new generation of modern contact proximity mask aligners, manufacturers seeking greater production flexibility to meet expanding market needs can now migrate their operations while staying within budget. By staying with still-valid, but greatly updated, contact and proximity photolithography technology, a wide variety of fabricators can enjoy larger production-quantity runs, greater choice in wafer size and shape, and improved flexibility in manufacturing processes, while still containing production expenses within the same cost-effective level that contact and proximity lithography provides.

The Roadmap to Growth
Once reserved solely for building integrated circuits, contact mask aligners are being updated to fabricate products in diverse industries such as biotechnology, consumer electronics, aerospace, communications, and transportation. Canon PLA and MPA series machines survive as extremely capable production machines—so much so that they still represent a very capable starting point in this migration to new markets. In the hands of competent remanufacturers, these machines are even enjoying a “second wind” of utility.

Despite this expanded utility, Canon mask aligners eventually run into the limitations imposed by older design and lack of OEM factory support. For this reason, some industries are turning to a new generation of contact aligners produced by established, smaller OEMs that redesign and expand the technology to meet the increased requirements of today’s new-market opportunities.

Deciding on when to modernize hinges on a number of considerations—general obsolescence, spares and service support, ergonomics, future application requirements—any one of which can act as a catalyst for embarking on a new growth plan for a manufacturer who wants to expand without making a Grand Canyon-sized leap to expensive and restrictive stepper technology.

Size, Shape, Type
New-generation contact mask aligners handle new sizes of substrates, ranging from pieces up to eight inches in diameter, which can help reduce production expenses when cost-cutting is necessary. These newer machines can also be adapted to handle different substrate shapes, such as squares and rectangles, which were never even imagined at the time when contact mask aligner technology was originated 25-plus years ago.

Particularly in R&D applications, the need to go beyond traditional quartz or glass plate photo masks has accelerated. When one-off prototyping is a top priority, newer mask aligners make excellent economic sense because they can handle thin film mylar masks—patterns can be generated and printed onto a mylar mask using nothing more than a high-quality laser printer.

Volume, Flexibility, Specificity
When a company moves beyond the R&D and prototyping stage into manufacturing large production quantities, moving up to a high-capacity contact mask aligner makes perfect sense. Here, the new-generation machines excel by offering features such as simple topside mask loading, robotic autoload handling, and auto-alignment.

Some tools offer the best of both worlds, initially featuring manual-tray loading, with the ability to simply add a module to switch over to high-capacity loading processes when need dictates. Because of the open architecture now employed within some new-generation contact mask aligners, manufacturers now have a wide variety of choices in customizing an aligner when unique fabricating requirements materialize.

Finances
Far from the least of considerations, economic realities often dictate when new production equipment gets purchased. In such instances, contact mask aligner technology promises the best benefit-to-cost ratio. New-generation contact aligners can reproduce traces as small as 2 microns at a fraction of the price of expensive stepper technology. In addition, the latest contact aligners give away little, if anything, in terms of flexibility to any other tools.

Some OEM manufacturers reduce costs even further by offering machines devoid of unnecessary features that a particular manufacture may not need. Again, an open architecture and modular-based system makes the cost-above-all-else path possible.

Just as important—precisely because contact proximity alignment technology has existed for so long—the latest generation of tools benefits from years of refinement to the point that they are extremely reliable and robust while still offering low overhead costs. As ongoing support contracts become less of a necessity, users can lower the cost of ownership even further.

Destination: Success

With the tremendous improvements incorporated into the latest generation of contact mask aligners over their predecessors, the technology will continue its useful life span well into the future. Manufacturers who opt to take advantage of this technology stand to leverage their investment through a significantly lowered cost of ownership, yet greatly increased production flexibility.

When someone says you can’t get there from here, simply respond: “Oh yes I can!” It’s no longer a matter of if, but rather when is the time to make the jump to new contact aligner technology.

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Neutronix-Quintel Introduces the new NXQ8000 Platform

Neutronix-Quintel has started shipping the new NXQ8000 Mask Aligner. The NXQ8000 was developed with a High Volume Manufacturing Partner and will replace the NXQ7000 series aligners moving forward. The new platform has many enhancements over previous series and is easily scalable from R&D to High Volume Manufacturing. For more information please visit the NXQ8000 series product page.

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